cmos sti
▫CMOSIC晶片通常使用晶圓.▫二極體和BiCMOS晶片通常使用晶圓...STI:STI光罩.8.STI:氮化矽、氧化矽及矽之蝕刻,光阻剝除.P型磊晶層.P型晶圓.N型 ...,CMOSIntegration.•Devicesarebuiltintoacommonp-typesubstrate(wafer).•ShallowTrenchIsolation(STI)provideselectri...
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由PSallagoity著作·1998·被引用30次—ThispaperpresentsanimprovedSTIprocesswhichhasbeendevelopedfora0.18μmCMOStechnology.AnewCVDsiliconoxidedepositionprocessachieves ...
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